Three Cavity Tunable MEMS Fabry Perot Interferometer
نویسندگان
چکیده
In this paper a four-mirror tunable micro electro-mechanical systems (MEMS)Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. Thespectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018(nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the threecavity lengths). Two different cases were separately considered for the tuning. In case one,tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 weredeflected for the tuning of the FPI.
منابع مشابه
Tunable infrared detector with integrated micromachined Fabry-Perot filter
This paper reports design, fabrication and test results of a tunable pyroelectric detector with an integrated micromachined Fabry-Perot (FP) filter for gas analysis in the Mid-Wave Infrared (MWIR). The new approach is based on a bulk micromachined Fabry-Perot interferometer with an air cavity, which is electrostatically tuned. Various types of moveable reflectors and spring configurations have ...
متن کاملFrequency tracking and stabilization of a tunable dual-wavelength external-cavity diode laser
We show a unique dual-wavelength external-cavity laser diode with frequency tracking capability and obtain a stable beat frequency between the dual-wavelength output. By using a Fabry–Perot interferometer as the frequency discriminator and the time-gating technique in a servo loop, the peak-to-peak frequency fluctuations were stabilized, with respect to the Fabry–Perot cavity, to 86 kHz in the ...
متن کاملPerformance Limits of a Micromachined Tunable-Cavity Filter
This paper focuses on the performance limits of a tunable-cavity Fabry-Perot filter (FPF) implemented using MEMS technology. This is a versatile device capable of many functions, including light modulation and high precision sensing. Our goal is to explore challenges and opportunities in implementing tunable-cavity filter using MEMS technology. Thermal stability and effects of fabrication imper...
متن کاملA novel algorithm for the signal interpolation of the displacement measurement based on a Fabry-Perot interferometer
Current commercial interferometers reveal excellent measurement performances, because of its major advantage which enables the displacement measurement with the characterization of the high resolution under the large measuring range. FabryPerot interferometer is a compact interferometer with the structure of common optical path. In comparison with the ordinary commercial laser interferometers h...
متن کاملMEMS Navigation-Grade Electro-Optical Accelerometer
Accurately measuring displacement of mechanical components on micro-scale devices is often the limiting factor affecting resolution for many MEMS-based sensors including accelerometers, Coriolis-based gyroscopes, pressure sensors, temperature sensors, and magnetometers. This paper introduces a novel electro-optical displacement detection scheme which has been applied to navigation-grade MEMS ac...
متن کامل